Stochastic modeling of coupled electromechanical interaction for uncertainty quantification in electrostatically actuated MEMS

DOI10.1016/j.cma.2008.01.005zbMath1194.78062OpenAlexW2044265944MaRDI QIDQ995302

Nitin Agarwal, N. R. Aluru

Publication date: 13 September 2010

Published in: Computer Methods in Applied Mechanics and Engineering (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.cma.2008.01.005

zbMATH Keywords

large deformationpolynomial chaosuncertainty propagationmultiphysicsgeometrical uncertaintyLagrangian electrostatic analysisspectral stochastic boundary element method (SSBEM)spectral stochastic finite element method (SSFEM)

Mathematics Subject Classification ID

Finite element, Galerkin and related methods applied to problems in optics and electromagnetic theory (78M10) Boundary element methods applied to problems in optics and electromagnetic theory (78M15) Electro- and magnetostatics (78A30)

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