Maximum a posteriori estimation of activation energies that control silicon self-diffusion

DOI10.1016/J.AUTOMATICA.2008.01.020zbMath1153.93511OpenAlexW2048570101MaRDI QIDQ999024

Charlotte T. M. Kwok, Richard D. Braatz, Edmund G. Seebauer, Kapil Dev

Publication date: 30 January 2009

Published in: Automatica (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.automatica.2008.01.020

zbMATH Keywords

parameter estimationrapid thermal processingBayesian estimationsemiconductor processes

Mathematics Subject Classification ID

Control/observation systems governed by partial differential equations (93C20) Estimation and detection in stochastic control theory (93E10)

Cites Work

• Qualitative and quantitative experiment design for phenomenological models - a survey
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