Nonlinear dynamic analysis of MEMS switches by nonlinear modal analysis
type: Item
instance of: scholarly article
title: Nonlinear dynamic analysis of MEMS switches by nonlinear modal analysis
zbMATH Open document ID: 1113.74405
DOI: 10.1023/A:1022914020076
author: D. Massart
published in: Nonlinear Dynamics
publication date: 2003-12-09T00:00:00Z
Mathematics Subject Classification ID: 74M05
Mathematics Subject Classification ID: 74K10
zbMATH DE Number: 2015020
zbMATH Keywords: nonlinear modal analysis
zbMATH Keywords: micro switch
zbMATH Keywords: clamped-clamped micro beams
MaRDI profile type: Publication
full work available at URL: a:1022914020076
OpenAlex ID: W174688274
description: scientific article; zbMATH DE number 2015020