Semi-analytic actuating and sensing in regular and irregular MEMs, single and assembled micro cantilevers
type: Item
instance of: scholarly article
title: Semi-analytic actuating and sensing in regular and irregular MEMs, single and assembled micro cantilevers
zbMATH Open document ID: 1438.74115
author: Peng Zhang
published in: Applied Mathematical Modelling
publication date: 2018-08-30T00:00:00Z
Mathematics Subject Classification ID: 74K20
Mathematics Subject Classification ID: 74H45
Mathematics Subject Classification ID: 74S99
Mathematics Subject Classification ID: 74E05
Mathematics Subject Classification ID: 74F05
zbMATH DE Number: 6929740
zbMATH Keywords: dynamic response
zbMATH Keywords: micro and nano electromechanical systems
zbMATH Keywords: micro cantilevers
zbMATH Keywords: assembled micro cantilever probes (ACPs)
zbMATH Keywords: GDQM
zbMATH Keywords: GDQEM
MaRDI profile type: Publication
full work available at URL: j.apm.2012.09.064
OpenAlex ID: W2082894933
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DOI: 10.1016/J.APM.2012.09.064
description: scientific article; zbMATH DE number 6929740