Multimode analysis of the dynamics and integrity of electrically actuated MEMS resonators
type: Item
instance of: scholarly article
title: Multimode analysis of the dynamics and integrity of electrically actuated MEMS resonators
zbMATH Open document ID: 1407.74103
DOI: 10.1155/2014/735712
author: Serge Bruno Yamgoué
author: Alain Juvenal Tchiegang
published in: Journal of Nonlinear Dynamics
publication date: 2019-02-27T00:00:00Z
review text: Summary: We present a theoretical investigation of the dynamic behavior of a microelectromechanical system (in brief, MEMS) device modelled as a clamped-clamped microbeam subjected to electrostatic and electrodynamic actuation. We use the Galerkin projection technique to reduce the partial integro-differential equation governing the dynamics of the microbeam to a system of coupled ordinary differential equations which describe the interactions of the linear mode shapes of the microbeam. Analytical solutions are derived and their stability is studied for the simplest reduced-order model which takes into account only the first linear mode in the Galerkin procedure. We further investigate the influence of the first few higher modes on the Galerkin procedure, and hence its convergence, by analysing the boundaries between pull-in and pull-in-free vibrations domains in the space of actuation parameters. These are determined for the various multimode combinations using direct numerical time integration. Our results show that unsafe domains form \(V\)-like shapes for actuation frequencies close to the superharmonic, fundamental, and subharmonic resonances. They also reveal that the single first-mode reduced model usually considered underestimates the left branches and overestimates the right branches of these boundaries.
Mathematics Subject Classification ID: 74S30
Mathematics Subject Classification ID: 74M25
Mathematics Subject Classification ID: 74F15
zbMATH DE Number: 7029938
Wikidata QID: Q59058100
describes a project that uses: AUTO
describes a project that uses: HomCont
describes a project that uses: MATCONT
MaRDI profile type: Publication
full work available at URL: https://doi.org/10.1155/2014/735712
OpenAlex ID: W1977901541
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description: scientific article; zbMATH DE number 7029938