Predictions of strength in MEMS components with defects --- a novel experimental--theoretical approach
type: Item
instance of: scholarly article
title: Predictions of strength in MEMS components with defects --- a novel experimental--theoretical approach
zbMATH Open document ID: 1143.74360
author: Niranjan Chakravarthy
published in: International Journal of Solids and Structures
publication date: 2005-05-12T00:00:00Z
Mathematics Subject Classification ID: 74R10
Mathematics Subject Classification ID: 74-05
Mathematics Subject Classification ID: 74K35
zbMATH DE Number: 2168031
zbMATH Keywords: Thin films
zbMATH Keywords: Fracture
zbMATH Keywords: Strength
zbMATH Keywords: MEMS
zbMATH Keywords: Brittle materials
MaRDI profile type: Publication
full work available at URL: j.ijsolstr.2004.06.026
OpenAlex ID: W2115728545
DOI: 10.1016/J.IJSOLSTR.2004.06.026
description: scientific article; zbMATH DE number 2168031