Thermoelastic damping in micromechanical resonators operating as mass sensors
type: Item
instance of: scholarly article
title: Thermoelastic damping in micromechanical resonators operating as mass sensors
zbMATH Open document ID: 1406.74505
author: Yanyan Li
published in: European Journal of Mechanics. A. Solids
publication date: 2018-10-08T00:00:00Z
Mathematics Subject Classification ID: 74M05
Mathematics Subject Classification ID: 74F05
zbMATH DE Number: 6948634
zbMATH Keywords: thermoelastic damping
zbMATH Keywords: micro-beam resonator
zbMATH Keywords: thermal energy approach
zbMATH Keywords: mass sensitivity
zbMATH Keywords: minimum detectable mass
MaRDI profile type: Publication
full work available at URL: j.euromechsol.2018.03.017
OpenAlex ID: W2789584740
cites work: Q4492681
cites work: Thermoelastic coupling effect on a micro-machined beam resonator
cites work: Thermoelastic vibration analysis of MEMS/NEMS plate resonators with voids
cites work: Thermoelastic damping in micro-beam resonators
Wikidata QID: Q130083472
DOI: 10.1016/J.EUROMECHSOL.2018.03.017
description: scientific article; zbMATH DE number 6948634