Mathematical modeling of polish-rate decay in chemical-mechanical polishing
type: Item
instance of: scholarly article
title: Mathematical modeling of polish-rate decay in chemical-mechanical polishing
zbMATH Open document ID: 1008.74526
DOI: 10.1023/A:1020305108358
author: Yanyan Li
published in: Journal of Engineering Mathematics
publication date: 2003-03-10T00:00:00Z
Mathematics Subject Classification ID: 74M15
Mathematics Subject Classification ID: 74E40
zbMATH DE Number: 1878776
zbMATH Keywords: chemical-mechanical polishing
zbMATH Keywords: Hamilton-Jacobi equation
zbMATH Keywords: polymer wear
zbMATH Keywords: rate decay
zbMATH Keywords: surfacestatistics
MaRDI profile type: Publication
full work available at URL: a:1020305108358
OpenAlex ID: W156119927
description: scientific article; zbMATH DE number 1878776