Tool capacity planning in semiconductor manufacturing.
type: Item
instance of: scholarly article
title: Tool capacity planning in semiconductor manufacturing.
zbMATH Open document ID: 1037.90513
DOI: 10.1016/S0305-0548(02)00075-8
author: Bülent Çatay
author: Asoo J. Vakharia
author: S. Selcuk Erenguc
published in: Computers \& Operations Research
publication date: 2003-04-28T00:00:00Z
Mathematics Subject Classification ID: 90B30
Mathematics Subject Classification ID: 90C11
zbMATH DE Number: 1901874
zbMATH Keywords: Production planning
zbMATH Keywords: Semiconductor manufacturing
zbMATH Keywords: Capacity planning
zbMATH Keywords: Mathematical programming
zbMATH Keywords: Lagrangean relaxation
MaRDI profile type: Publication
cites work: A capacity allocation problem with integer side constraints
cites work: Hierarchical Production Planning: A Single Stage System
cites work: Hierarchical Production Planning: A Two-Stage System
cites work: Tool capacity planning for semiconductor fabrication facilities under demand uncertainty
cites work: Q4178782
description: scientific article; zbMATH DE number 1901874