Arbitrary-pressure chemical vapor deposition modeling using direct simulation Monte Carlo with nonlinear surface chemistry
type: Item
instance of: scholarly article
title: Arbitrary-pressure chemical vapor deposition modeling using direct simulation Monte Carlo with nonlinear surface chemistry
zbMATH Open document ID: 1068.82524
author: Husain A. Al-Mohssen
author: N. G. Hadjiconstantinou
published in: Journal of Computational Physics
publication date: 2004-09-23T00:00:00Z
Mathematics Subject Classification ID: 82B80
zbMATH DE Number: 2102459
MaRDI profile type: Publication
full work available at URL: j.jcp.2004.01.018
OpenAlex ID: W2060028168
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DOI: 10.1016/J.JCP.2004.01.018
description: scientific article; zbMATH DE number 2102459