Modeling and simulation of sublimation growth of SiC bulk single crystals
type: Item
instance of: scholarly article
title: Modeling and simulation of sublimation growth of SiC bulk single crystals
zbMATH Open document ID: 1081.35117
DOI: 10.4171/IFB/101
author: Olaf Klein
author: Peter Philip
author: Jürgen Sprekels
published in: Interfaces and Free Boundaries
publication date: 2004-11-01T00:00:00Z
review text: Summary: We present a transient mathematical model for the sublimation growth of silicon carbide (SiC) single crystals by the physical vapor transport (PVT) method. The model of the gas phase consists of balance equations for mass, momentum, and energy, as well as reaction-diffusion equations. Due to physical and chemical reactions, the gas phase is encompassed by free boundaries. Nonlinear heat transport equations are considered in the various solid components of the growth system. Discontinuous and nonlocal interface conditions are formulated to account for temperature steps between gas and solid as well as for diffuse-gray radiative heat transfer between cavity surfaces. An axisymmetric induction heating model is devised using a magnetic scalar potential. For a nonlinear evolution problem arising from the model, a finite volume scheme is stated, followed by a discrete existence and uniqueness result. We conclude by presenting and analyzing results of transient numerical experiments relevant to the physical growth process.
Mathematics Subject Classification ID: 35Q72
Mathematics Subject Classification ID: 80A20
Mathematics Subject Classification ID: 80M25
Mathematics Subject Classification ID: 76M12
Mathematics Subject Classification ID: 74N05
zbMATH DE Number: 2113536
zbMATH Keywords: solid phase
zbMATH Keywords: physical vapor transport
zbMATH Keywords: diffuse-gray radiation
zbMATH Keywords: nonlocal interface conditions
zbMATH Keywords: lasers
zbMATH Keywords: industrial applications
zbMATH Keywords: semiconductor substrate
zbMATH Keywords: electronic and optoelectronic devices
zbMATH Keywords: gas phase
zbMATH Keywords: free boundaries
zbMATH Keywords: Nonlinear heat transport
MaRDI profile type: Publication
full work available at URL: https://doi.org/10.4171/ifb/101
OpenAlex ID: W2017222967
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description: scientific article; zbMATH DE number 2113536