Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing
type: Item
instance of: scholarly article
title: Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing
zbMATH Open document ID: 0847.90073
DOI: 10.1016/0305-0548(95)00062-3
author: Edward A. Rietman
author: Suresh H. Patel
author: Earl R. Lory
published in: Computers \& Operations Research
publication date: 1996-07-01T00:00:00Z
Mathematics Subject Classification ID: 90B30
Mathematics Subject Classification ID: 90B90
Mathematics Subject Classification ID: 92B20
zbMATH DE Number: 895079
zbMATH Keywords: modeling and control of processes
zbMATH Keywords: neural network
MaRDI profile type: Publication
full work available at URL: 0305-0548(95)00062-3
OpenAlex ID: W2059317407
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cites work: Learning Process in an Asymmetric Threshold Network
cites work: Q4695273
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description: scientific article; zbMATH DE number 895079