A microsystem for the fracture characterization of polysilicon at the micro-scale
type: Item
instance of: scholarly article
title: A microsystem for the fracture characterization of polysilicon at the micro-scale
zbMATH Open document ID: 1261.74027
author: Alberto Corigliano
author: Giacomo Langfelder
author: A. Longoni
author: F. Zaraga
author: A. Merassi
author: Aldo Ghisi
published in: European Journal of Mechanics. A. Solids
publication date: 2013-04-25T00:00:00Z
Mathematics Subject Classification ID: 74R10
Mathematics Subject Classification ID: 74S05
Mathematics Subject Classification ID: 74-05
zbMATH DE Number: 6157634
zbMATH Keywords: microsystem
zbMATH Keywords: polysilicon fracture
zbMATH Keywords: mechanical testing
zbMATH Keywords: cohesive crack simulation
MaRDI profile type: Publication
full work available at URL: j.euromechsol.2010.09.006
OpenAlex ID: W1980649632
cites work: Computational modelling of impact damage in brittle materials
cites work: Fracture Toughness and Subcritical Crack Growth in Polycrystalline Silicon
cites work: Q3243972
cites work: From crack deflection to lattice vibrations--macro to atomistic examination of dynamic cleavage fracture
DOI: 10.1016/J.EUROMECHSOL.2010.09.006
description: scientific article; zbMATH DE number 6157634