A 2-D model that accounts for 3-D fringing in MEMS devices
type: Item
instance of: scholarly article
title: A 2-D model that accounts for 3-D fringing in MEMS devices
zbMATH Open document ID: 1195.78082
author: Krishnan Suresh
author: Murari Sinha
published in: Engineering Analysis with Boundary Elements
publication date: 2010-09-28T00:00:00Z
Mathematics Subject Classification ID: 78M25
Mathematics Subject Classification ID: 78A30
zbMATH DE Number: 5792787
zbMATH Keywords: MEMS
zbMATH Keywords: dimensional reduction
zbMATH Keywords: fringing
zbMATH Keywords: CAD
MaRDI profile type: Publication
full work available at URL: j.enganabound.2006.07.007
OpenAlex ID: W2068959278
cites work: Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives
cites work: Numerical analysis of 3D electrostatics of deformable conductors using a Lagrangian approach
cites work: MST MEMS model order reduction: requirements and benchmarks
cites work: A fast algorithm for three‐dimensional electrostatics analysis: fast Fourier transform on multipoles (FFTM)
cites work: A fast boundary cloud method for 3D exterior electrostatic analysis
cites work: Electrostatic BEM for MEMS with thin conducting plates and shells
cites work: The derivation of a thick and thin plate formulation without ad hoc assumptions
cites work: The hierarchical concept in finite element analysis
DOI: 10.1016/J.ENGANABOUND.2006.07.007
Recommended article: Variational approach to MEMS model with fringing field
Recommended article: On MEMS equation with fringing field
Recommended article: On the quenching behavior of the MEMS with fringing field
Recommended article: Curvature-dependent electrostatic field as a principle for modelling membrane MEMS device with fringing field
Recommended article: A new model for electrostatic MEMS with two free boundaries
Recommended article: MEMS with fringing field: curvature-dependent electrostatic field and numerical techniques for recovering the membrane profile
Recommended article: On a parabolic equation in MEMS with fringing field
Recommended article: A continuum-based modeling of MEMS devices for estimating their resonant frequencies
Recommended article: A constrained model for MEMS with varying dielectric properties
Recommended article: On a three-dimensional free boundary problem modeling electrostatic MEMS
description: scientific article; zbMATH DE number 5792787