Effect of nonlinearity on mode localization phenomena in dynamics of MEMS resonant sensor with two electrostatically coupled microbeams
type: Item
instance of: scholarly article
title: Effect of nonlinearity on mode localization phenomena in dynamics of MEMS resonant sensor with two electrostatically coupled microbeams
zbMATH Open document ID: 1471.74025
DOI: 10.1134/S1063454121020072
author: N. I. Morozov
author: V. S. Igumnova
author: A. V. Lukin
author: I. A. Popov
author: L. V. Shtukin
author: D. A. Indejtsev
published in: Vestnik St. Petersburg University. Mathematics
publication date: 2021-08-20T00:00:00Z
Mathematics Subject Classification ID: 74H45
Mathematics Subject Classification ID: 74K10
Mathematics Subject Classification ID: 74F15
zbMATH DE Number: 7384029
zbMATH Keywords: resonant accelerometer
zbMATH Keywords: weakly coupled system
zbMATH Keywords: modal localization
zbMATH Keywords: resonance curve
MaRDI profile type: Publication
description: scientific article; zbMATH DE number 7384029