Enhanced Kalman-filtering iterative learning control with application to a wafer scanner
type: Item
instance of: scholarly article
title: Enhanced Kalman-filtering iterative learning control with application to a wafer scanner
zbMATH Open document ID: 1478.93183
author: Yang Liu
author: Li Li
author: Xiaofeng Yang
author: Jiubin Tan
published in: Information Sciences
publication date: 2021-11-30T00:00:00Z
Mathematics Subject Classification ID: 93B47
Mathematics Subject Classification ID: 93E11
zbMATH DE Number: 7436030
zbMATH Keywords: iterative learning control
zbMATH Keywords: feedforward control
zbMATH Keywords: motion control
zbMATH Keywords: wafer stage
MaRDI profile type: Publication
full work available at URL: j.ins.2020.05.125
OpenAlex ID: W3040037754
cites work: State estimation in the presence of bounded disturbances
cites work: A statistical analysis of certain iterative learning control algorithms
cites work: On the disturbance properties of high order iterative learning control algorithms
cites work: Discrete-time inverse model-based iterative learning control: stability, monotonicity and robustness
cites work: A computationally efficient algorithm of iterative learning control for discrete-time linear time-varying systems
cites work: From model-based control to data-driven control: survey, classification and perspective
cites work: Convergence analysis of wireless remote iterative learning control systems with channel noise
cites work: An average operator-based PD-type iterative learning control for variable initial state error
cites work: Data-driven optimal tracking control of discrete-time multi-agent systems with two-stage policy iteration algorithm
cites work: Ellipsoidal parameter or state estimation under model uncertainty
cites work: Iterative learning control with wavelet filtering
cites work: Selection of the learning gain matrix of an iterative learning control algorithm in presence of measurement noise
cites work: Two updating schemes of iterative learning control for networked control systems with random data dropouts
cites work: Dynamic learning from adaptive neural control with predefined performance for a class of nonlinear systems
cites work: Distributed networked set-membership filtering with ellipsoidal state estimations
cites work: A just-in-time-learning based two-dimensional control strategy for nonlinear batch processes
DOI: 10.1016/J.INS.2020.05.125
description: scientific article; zbMATH DE number 7436030