Multiscale simulation of nonlinear processes in technical microsystems
type: Item
instance of: scholarly article
zbMATH Open document ID: 1349.76770
publication date: 2016-02-22T00:00:00Z
full work available at URL: mm3624
Mathematics Subject Classification ID: 76N15
Mathematics Subject Classification ID: 76T30
Mathematics Subject Classification ID: 76Y05
zbMATH DE Number: 6544222
zbMATH Keywords: microsystems
zbMATH Keywords: grid methods
zbMATH Keywords: molecular dynamics
zbMATH Keywords: supersonic flows
MaRDI profile type: Publication
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author: Yu. N. Karamzin
author: T. A. Kudryashova
author: V. O. Podryga
author: S. V. Polyakov
title: Multiscale simulation of nonlinear processes in technical microsystems
published in: Matematicheskoe Modelirovanie
review text: Different approaches are used for an investigation of nonlinear gas dynamical processes on macro- micro- and nano-scale levels. An approach combining numerical calculations of gas dynamical equations on the macro level, and a molecular modeling on the micro and nano levels is proposed. Splitting the algorithm on physical processes and scales, grid methods and methods of molecular dynamics characterize this approach. Parameters of supersonic flows of a binary gas mixture in the supersonic cold gas sputtering device are found.
reviewed by: Sergei Georgievich Zhuravlev
description: scientific article; zbMATH DE number 6544222