Determination of the conductance and thickness of semiconductor wafers and nanometer layers with the use of one-dimensional microwave photonic crystals
A matrix of wave transmission is used to calculate the reflection and transmission coefficients of the electromagnetic radiation at the interaction with the photonic crystal. Multilayer one-dimensional photonic crystals are studied. Least square methods are used to exclude the ambiguity in the solution of the inverse problem. Applicability limits are investigated.
scientific article; zbMATH DE number 6188943