Determination of the conductance and thickness of semiconductor wafers and nanometer layers with the use of one-dimensional microwave photonic crystals
type: Item
instance of: scholarly article
title: Determination of the conductance and thickness of semiconductor wafers and nanometer layers with the use of one-dimensional microwave photonic crystals
zbMATH Open document ID: 1274.82084
DOI: 10.1134/S1028335813010023
publication date: 2013-07-17T00:00:00Z
Mathematics Subject Classification ID: 82D37
Mathematics Subject Classification ID: 82D80
Mathematics Subject Classification ID: 78A40
Mathematics Subject Classification ID: 82D25
zbMATH DE Number: 6188943
zbMATH Keywords: multilayer photonic crystal
zbMATH Keywords: semiconductors
zbMATH Keywords: wave parameters
MaRDI profile type: Publication
Wikidata QID: Q57670812
full work available at URL: s1028335813010023
OpenAlex ID: W2083053948
published in: Doklady Akademii Nauk
author: S. A. Nikitov
author: Yu. V. Gulyaev
author: D. A. Usanov
author: A. V. Skripal'
author: D. V. Ponomarev
review text: A matrix of wave transmission is used to calculate the reflection and transmission coefficients of the electromagnetic radiation at the interaction with the photonic crystal. Multilayer one-dimensional photonic crystals are studied. Least square methods are used to exclude the ambiguity in the solution of the inverse problem. Applicability limits are investigated.
description: scientific article; zbMATH DE number 6188943