Reactive magnetron sputter deposition of (Ti, Cu)N nano-crystalline thin films: modeling of particle and energy flux toward the substrate
type: Item
instance of: scholarly article
zbMATH Open document ID: 1282.82065
DOI: 10.1088/0031-8949/86/02/025301
published in: Physica Scripta
publication date: 2013-08-20T00:00:00Z
Mathematics Subject Classification ID: 82D80
Mathematics Subject Classification ID: 81V55
zbMATH DE Number: 6199631
MaRDI profile type: Publication
full work available at URL: https://doi.org/10.1088/0031-8949/86/02/025301
OpenAlex ID: W2050966084
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title: Reactive magnetron sputter deposition of (Ti, Cu)N nano-crystalline thin films: modeling of particle and energy flux toward the substrate
author: A. Rahmati
description: scientific article; zbMATH DE number 6199631