A decoupled inversion-based iterative control approach to multi-axis precision positioning: 3D nanopositioning example
type: Item
instance of: scholarly article
title: A decoupled inversion-based iterative control approach to multi-axis precision positioning: 3D nanopositioning example
zbMATH Open document ID: 1244.93062
author: Yan Yan
author: Haiming Wang
author: Qingze Zou
published in: Automatica
publication date: 2012-08-24T00:00:00Z
Mathematics Subject Classification ID: 93B51
Mathematics Subject Classification ID: 68T05
zbMATH DE Number: 6071686
zbMATH Keywords: iterative learning control
zbMATH Keywords: system inversion
zbMATH Keywords: dynamics coupling
zbMATH Keywords: nanopositioning control
MaRDI profile type: Publication
full work available at URL: j.automatica.2011.09.032
OpenAlex ID: W2027071034
cites work: Synthesis of robust multivariable iterative learning controllers with application to a wafer stage motion system
cites work: Q4230520
cites work: On the equivalence of causal LTI iterative learning control and feedback control
cites work: On the design of ILC algorithms using optimization
cites work: Study on robustness of iterative learning control with non-zero initial error
cites work: Q5526190
cites work: Iterative learning control with initial rectifying action
cites work: On admissible pairs and equivalent feedback-Youla parameterization in iterative learning control
cites work: A composite energy function-based learning control approach for nonlinear systems with time-varying parametric uncertainties
cites work: On initial conditions in iterative learning control
cites work: Clean system inversion learning control law
DOI: 10.1016/J.AUTOMATICA.2011.09.032
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description: scientific article; zbMATH DE number 6071686