Q4623890
type: Item
instance of: scholarly article
zbMATH Open document ID: 1424.93081
DOI: 10.7641/CTA.2017.70434
publication date: 2019-02-22T00:00:00Z
Mathematics Subject Classification ID: 93B51
Mathematics Subject Classification ID: 93D05
zbMATH DE Number: 7028202
zbMATH Keywords: run-to-run control
zbMATH Keywords: metrology delay
zbMATH Keywords: EWMA algorithm
zbMATH Keywords: EM algorithm
MaRDI profile type: Publication
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description: scientific article; zbMATH DE number 7028202