An Elementary Model for Control of a Semiconductor Etching Process
type: Item
instance of: scholarly article
title: An Elementary Model for Control of a Semiconductor Etching Process
zbMATH Open document ID: 1127.80301
DOI: 10.1137/S0036144500382295
published in: SIAM Review
publication date: 2003-01-05T00:00:00Z
Mathematics Subject Classification ID: 80A50
Mathematics Subject Classification ID: 00A71
zbMATH DE Number: 1848776
zbMATH Keywords: semiconductor etching
zbMATH Keywords: mathematical modeling
zbMATH Keywords: spectroscopic ellipsometry
zbMATH Keywords: control
MaRDI profile type: Publication
full work available at URL: s0036144500382295
OpenAlex ID: W2084108138
description: scientific article; zbMATH DE number 1848776