Q5248174
type: Item
instance of: scholarly article
zbMATH Open document ID: 1311.92006
author: Meraa Arab
publication date: 2015-04-27T00:00:00Z
Mathematics Subject Classification ID: 92-02
Mathematics Subject Classification ID: 92E20
Mathematics Subject Classification ID: 90C90
Mathematics Subject Classification ID: 00A72
zbMATH DE Number: 6431339
zbMATH Keywords: chemical vapor deposition
zbMATH Keywords: homogeneous deposition
zbMATH Keywords: relaxation scheme
zbMATH Keywords: operator-splitting method
MaRDI profile type: Publication
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description: scientific article; zbMATH DE number 6431339