Kinetic plasma simulations for three dielectric etchers
type: Item
instance of: scholarly article
title: Kinetic plasma simulations for three dielectric etchers
zbMATH Open document ID: 1196.82051
author: D. Kharzeev
published in: Computer Physics Communications
publication date: 2010-10-18T00:00:00Z
Mathematics Subject Classification ID: 82-08
Mathematics Subject Classification ID: 82D10
Mathematics Subject Classification ID: 82B80
zbMATH DE Number: 5801788
zbMATH Keywords: dual-frequency
zbMATH Keywords: capacitively coupled plasma
zbMATH Keywords: etcher
zbMATH Keywords: particle simulation
zbMATH Keywords: Monte Carlo collision
MaRDI profile type: Publication
full work available at URL: j.cpc.2007.02.070
OpenAlex ID: W1967574375
DOI: 10.1016/J.CPC.2007.02.070
description: scientific article; zbMATH DE number 5801788