Stable method for optical monitoring the deposition of multilayer optical coatings
type: Item
instance of: scholarly article
title: Stable method for optical monitoring the deposition of multilayer optical coatings
zbMATH Open document ID: 1455.78013
DOI: 10.1134/S0965542520120064
author: Yu. S. Lagutin
author: A. A. Lagutina
author: A. V. Tikhonravov
author: Igor V. Kochikov
author: D. V. Lukyanenko
author: A. G. Yagola
published in: Computational Mathematics and Mathematical Physics
publication date: 2021-01-08T00:00:00Z
Mathematics Subject Classification ID: 78A55
Mathematics Subject Classification ID: 78M99
Mathematics Subject Classification ID: 78-05
zbMATH DE Number: 7291194
zbMATH Keywords: multilayer coatings
zbMATH Keywords: monochromatic optical monitoring
zbMATH Keywords: numerical algorithms
zbMATH Keywords: analysis of experimental data
MaRDI profile type: Publication
cites work: Raising the accuracy of monitoring the optical coating deposition by application of a nonlocal algorithm of data analysis
full work available at URL: s0965542520120064
OpenAlex ID: W3120532818
description: scientific article; zbMATH DE number 7291194