The damping in MEMS inertial sensors both at high and low pressure levels
type: Item
instance of: scholarly article
title: The damping in MEMS inertial sensors both at high and low pressure levels
zbMATH Open document ID: 1178.74077
author: Francesco Braghin
author: Elisabetta Leo
author: Ferruccio Resta
published in: Nonlinear Dynamics
publication date: 2009-09-11T00:00:00Z
Mathematics Subject Classification ID: 74H45
Mathematics Subject Classification ID: 74M25
zbMATH DE Number: 5603293
zbMATH Keywords: MEMS modeling
zbMATH Keywords: inertial sensor
zbMATH Keywords: air damping
zbMATH Keywords: Navier-Stokes equations
zbMATH Keywords: kinetic theory of gases
MaRDI profile type: Publication
full work available at URL: s11071-008-9354-2
OpenAlex ID: W1989033210
cites work: On the evaluation of damping in MEMS in the slip-flow regime
cites work: Q5736822
cites work: Analysis of the Air-damping Effect on a Micromachined Beam Resonator
cites work: Kinetic theory and fluid dynamics
cites work: Q4492758
cites work: Microflows and nanoflows. Fundamentals and simulation. Foreword by Chih-Ming Ho.
DOI: 10.1007/S11071-008-9354-2
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description: scientific article; zbMATH DE number 5603293