Modeling and calculation of slurry-chemistry effects on chemical-mechanical planarization with a grooved pad (Q1000849)
From MaRDI portal
 | This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use this page instead for the normal view: Modeling and calculation of slurry-chemistry effects on chemical-mechanical planarization with a grooved pad |
scientific article; zbMATH DE number 5506388
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Modeling and calculation of slurry-chemistry effects on chemical-mechanical planarization with a grooved pad |
scientific article; zbMATH DE number 5506388 |
Statements
Modeling and calculation of slurry-chemistry effects on chemical-mechanical planarization with a grooved pad (English)
0 references
11 February 2009
0 references
Chemical-mechanical planarization
0 references
Contact mechanics
0 references
Grooved pads
0 references
Lubrication theory
0 references
Material removal rate
0 references
Slurry impurity
0 references
