Modeling and modification of the parallel plate variable MEMS capacitors considering deformation issue (Q1016932)
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scientific article; zbMATH DE number 5554124
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Modeling and modification of the parallel plate variable MEMS capacitors considering deformation issue |
scientific article; zbMATH DE number 5554124 |
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Modeling and modification of the parallel plate variable MEMS capacitors considering deformation issue (English)
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14 May 2009
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pull-in voltage
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deflection
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electrostatic force
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