Measurement of the thermal transport properties of dielectric thin films using the micro-Raman method (Q1045558)
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scientific article; zbMATH DE number 5648389
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Measurement of the thermal transport properties of dielectric thin films using the micro-Raman method |
scientific article; zbMATH DE number 5648389 |
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Measurement of the thermal transport properties of dielectric thin films using the micro-Raman method (English)
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15 December 2009
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thermal conductivity
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dielectric thin films
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submicrometer- or nanometer-scale
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porous silicon
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thermal effect micro-systems (TEMS)
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