Adaptive control to a dry etch process by microcomputer (Q1168929)
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scientific article; zbMATH DE number 3777350
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Adaptive control to a dry etch process by microcomputer |
scientific article; zbMATH DE number 3777350 |
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Adaptive control to a dry etch process by microcomputer (English)
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1982
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solid-state physics
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microcomputers
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dry etch processes
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real-time control system with adaptive control
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recursive least-squares estimation
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deadbeat controller
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