Finite element analysis of silicon condenser microphones with corrugated diaphragms (Q1274177)
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scientific article; zbMATH DE number 1238239
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Finite element analysis of silicon condenser microphones with corrugated diaphragms |
scientific article; zbMATH DE number 1238239 |
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Finite element analysis of silicon condenser microphones with corrugated diaphragms (English)
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12 January 1999
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geometrically nonlinear finite element method
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stress stiffening
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mechanical sensitivity of diaphragm
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optimum values in design parameters
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