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A combination of characteristics and Monte Carlo methods for etch profile simulation (Q1294150)

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scientific article; zbMATH DE number 1310993
Language Label Description Also known as
English
A combination of characteristics and Monte Carlo methods for etch profile simulation
scientific article; zbMATH DE number 1310993

    Statements

    title
    A combination of characteristics and Monte Carlo methods for etch profile simulation (English)
    0 references
    author
    K. Appert
    0 references
    publication date
    1998
    0 references
    describes a project that uses
    UNCMND
    0 references
    pchip
    0 references
    cites work
    Q3999241
    0 references
    Q3824736
    0 references
    Q3802475
    0 references
    Q5289009
    0 references
    Q3997712
    0 references
    Q3996938
    0 references

    Identifiers

    zbMATH DE Number
    1310993
    0 references
    OpenAlex ID
    W2000383630
    0 references
     
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