A free boundary value problem for the one dimensional oxidation process of silicon (Q1340718)
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scientific article; zbMATH DE number 704201
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A free boundary value problem for the one dimensional oxidation process of silicon |
scientific article; zbMATH DE number 704201 |
Statements
A free boundary value problem for the one dimensional oxidation process of silicon (English)
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12 June 1995
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nonlinear boundary conditions
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nonlinear free boundary value problem
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thermal oxidation process of silicon
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diffusion of oxygen
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Hölder space methods
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maximum principle
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