A two-dimensional model of the chemical vapor deposition of silicon nitride in a low-pressure hot-wall reactor including multicomponent diffusion (Q1388377)
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scientific article; zbMATH DE number 1162351
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A two-dimensional model of the chemical vapor deposition of silicon nitride in a low-pressure hot-wall reactor including multicomponent diffusion |
scientific article; zbMATH DE number 1162351 |
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A two-dimensional model of the chemical vapor deposition of silicon nitride in a low-pressure hot-wall reactor including multicomponent diffusion (English)
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15 November 1998
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