A dual-mixed hybrid formulation for fluid mechanics problems: Mathematical analysis and application to semiconductor process technology (Q1400232)
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scientific article; zbMATH DE number 1963646
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A dual-mixed hybrid formulation for fluid mechanics problems: Mathematical analysis and application to semiconductor process technology |
scientific article; zbMATH DE number 1963646 |
Statements
A dual-mixed hybrid formulation for fluid mechanics problems: Mathematical analysis and application to semiconductor process technology (English)
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13 August 2003
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dual-mixed-hybrid formulation
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optimal error estimates
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stress field
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thermal oxidation
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semiconductor technology
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local oxidation structure
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