A mathematical model for wet-chemical diffusion-controlled mask etching through a circular hole (Q1404099)
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scientific article; zbMATH DE number 1968148
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A mathematical model for wet-chemical diffusion-controlled mask etching through a circular hole |
scientific article; zbMATH DE number 1968148 |
Statements
A mathematical model for wet-chemical diffusion-controlled mask etching through a circular hole (English)
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20 August 2003
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asymptotic solutions
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diffusion-controlled wet-chemical etching
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mask opening
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oblate spheroidal coordinates
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