A Monte Carlo model for predicting the effective emissivity of the silicon wafer in rapid thermal processing furnaces (Q1598342)
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scientific article; zbMATH DE number 1747596
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | A Monte Carlo model for predicting the effective emissivity of the silicon wafer in rapid thermal processing furnaces |
scientific article; zbMATH DE number 1747596 |
Statements
A Monte Carlo model for predicting the effective emissivity of the silicon wafer in rapid thermal processing furnaces (English)
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5 August 2002
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rapid thermal processing
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effective emissivity model
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Monte Carlo method
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