Size dependent dynamic behavior of electrostatically actuated microbridges (Q1626325)
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scientific article; zbMATH DE number 6985251
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Size dependent dynamic behavior of electrostatically actuated microbridges |
scientific article; zbMATH DE number 6985251 |
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Size dependent dynamic behavior of electrostatically actuated microbridges (English)
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27 November 2018
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size dependent theory
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microresonators
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analytical method
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nonlinear finite element simulation
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0.90986437
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0.89875793
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0.8711979
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0.8709131
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0.87000805
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0.86290514
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0.8570012
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0.85628104
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0.8492142
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