Dynamics of electrostatic microelectromechanical systems actuators (Q2861712)
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scientific article; zbMATH DE number 6224894
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Dynamics of electrostatic microelectromechanical systems actuators |
scientific article; zbMATH DE number 6224894 |
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Dynamics of electrostatic microelectromechanical systems actuators (English)
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11 November 2013
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0.9580058
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0.9109049
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0.90939367
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0.9074395
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0.90141743
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0.8976772
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0.89513916
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