Thin-film deposition modeling of hydrogenated amorphous silicon in the afterglow of argon plasma (Q1643702)
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scientific article; zbMATH DE number 6891043
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Thin-film deposition modeling of hydrogenated amorphous silicon in the afterglow of argon plasma |
scientific article; zbMATH DE number 6891043 |
Statements
Thin-film deposition modeling of hydrogenated amorphous silicon in the afterglow of argon plasma (English)
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19 June 2018
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afterglow
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deposition rate
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argon plasma
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