Predictions of strength in MEMS components with defects --- a novel experimental--theoretical approach (Q1777193)
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scientific article; zbMATH DE number 2168031
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Predictions of strength in MEMS components with defects --- a novel experimental--theoretical approach |
scientific article; zbMATH DE number 2168031 |
Statements
Predictions of strength in MEMS components with defects --- a novel experimental--theoretical approach (English)
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12 May 2005
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Thin films
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Fracture
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Strength
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MEMS
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Brittle materials
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