Monte Carlo study of surface and line-width roughness of resist film surfaces during dissolution (Q1780467)
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scientific article; zbMATH DE number 2175404
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Monte Carlo study of surface and line-width roughness of resist film surfaces during dissolution |
scientific article; zbMATH DE number 2175404 |
Statements
Monte Carlo study of surface and line-width roughness of resist film surfaces during dissolution (English)
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13 June 2005
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Surface roughness
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Line-edge roughness
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Dissolution
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Lattice models of polymer chains
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Monte Carlo method
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0.6670107841491699
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0.6618730425834656
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