Mechanics of Smart-Cut technology (Q1781473)
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scientific article; zbMATH DE number 2183130
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Mechanics of Smart-Cut technology |
scientific article; zbMATH DE number 2183130 |
Statements
Mechanics of Smart-Cut technology (English)
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27 June 2005
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Crack
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Debonding
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Fracture
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Stress intensity factor
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Micro-mechanics
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Analytic solution
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Chemo-mechanical process
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Semiconductor material
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0.77777207
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0.7754713
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0.7580639
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0.7572483
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