Mathematical modeling of polish-rate decay in chemical-mechanical polishing (Q1861661)
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scientific article; zbMATH DE number 1878776
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Mathematical modeling of polish-rate decay in chemical-mechanical polishing |
scientific article; zbMATH DE number 1878776 |
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Mathematical modeling of polish-rate decay in chemical-mechanical polishing (English)
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10 March 2003
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chemical-mechanical polishing
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Hamilton-Jacobi equation
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polymer wear
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rate decay
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surfacestatistics
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