Arbitrary-pressure chemical vapor deposition modeling using direct simulation Monte Carlo with nonlinear surface chemistry (Q1879617)
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scientific article; zbMATH DE number 2102459
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Arbitrary-pressure chemical vapor deposition modeling using direct simulation Monte Carlo with nonlinear surface chemistry |
scientific article; zbMATH DE number 2102459 |
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Arbitrary-pressure chemical vapor deposition modeling using direct simulation Monte Carlo with nonlinear surface chemistry (English)
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23 September 2004
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