Application of iterative methods for solving nonsymmetric linear systems in the simulation of semiconductor processing (Q1893507)

This paper is a survey on application of iterative methods for solving nonsymmetric linear systems in the simulation of semiconductor processing. The conjugate gradient-type algorithms CGS, Bi-CGSTAB and GMRES as well as the Broyden-type secant method GB specially adapted to the linear case are considerd. The algorithms, including ILU-D as a preconditioner, are given and their performance is compared on an industrial application within the process simulator MIMAS II. The physics of process simulation, as the physical background of the application, is briefly sketched.