Mathematical model of the process of growing single-crystal silicide films on silicon (Q1909108)
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scientific article; zbMATH DE number 853923
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Mathematical model of the process of growing single-crystal silicide films on silicon |
scientific article; zbMATH DE number 853923 |
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Mathematical model of the process of growing single-crystal silicide films on silicon (English)
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18 March 1996
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diffusion flow
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annealing stages
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analytical expression
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annealing temperature
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