Computation of 3D MEMS electrostatics using a nearly exact BEM solver (Q1958213)
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scientific article; zbMATH DE number 5792762
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Computation of 3D MEMS electrostatics using a nearly exact BEM solver |
scientific article; zbMATH DE number 5792762 |
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Computation of 3D MEMS electrostatics using a nearly exact BEM solver (English)
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28 September 2010
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boundary element method
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Green function
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electrostatics
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MEMS
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thin plates
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