Optimization of the inlet velocity profile for uniform epitaxial growth in a vertical metalorganic chemical vapor deposition reactor (Q1972952)
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scientific article; zbMATH DE number 1436717
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Optimization of the inlet velocity profile for uniform epitaxial growth in a vertical metalorganic chemical vapor deposition reactor |
scientific article; zbMATH DE number 1436717 |
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Optimization of the inlet velocity profile for uniform epitaxial growth in a vertical metalorganic chemical vapor deposition reactor (English)
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20 February 2001
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uniform epitaxial growth
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vertical metalorganic chemical vapor deposition reactor
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optimization procedure
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inlet velocity profile
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6th-degree Chebyshev polynomial
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