Enhanced Kalman-filtering iterative learning control with application to a wafer scanner (Q2053823)
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scientific article; zbMATH DE number 7436030
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Enhanced Kalman-filtering iterative learning control with application to a wafer scanner |
scientific article; zbMATH DE number 7436030 |
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Enhanced Kalman-filtering iterative learning control with application to a wafer scanner (English)
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30 November 2021
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iterative learning control
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feedforward control
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motion control
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wafer stage
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